Building Mnemonic: ENG
Building Number: 017
The SMFL Facility started out as the RIT Microelectronic Engineering cleanroom facility. The main portion of the facility is 10,000 sq. ft. of class 1000 cleanroom with a bay and chase configuration. Additional laboratory space includes a class 100/10 MEBES E-beam Laboratory, an Excimer Laser Laboratory, a surface analysis laboratory, a chemical-mechanical planarization laboratory, and an electrical characterization laboratory. The bay and chase designed SMFL includes complete equipment set for 100 and 150mm CMOS processing